Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/17/2002
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Application #:
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09138802
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Filing Dt:
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08/24/1998
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Publication #:
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Pub Dt:
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03/21/2002
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Inventors:
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TORU TAKISAWA, TAKAO YONEHARA, KENJI YAMAGATA
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Title:
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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPORT APPARATUS, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE FABRICATION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, SHIMARUKO 3-CHOME |
| OHTA-KU, TOKYO, JAPAN |
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| MORGAN & FINNEGAN, LLP |
| MICHAEL M. MURRAY |
| 345 PARK AVENUE |
| NEW YORK, NY 10154 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT ASSIGNEE ADDRESS, PREVIOUSLY RECORDED AT REEL 9408, FRAME 0936.
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| 30-2, SHIMOMARUKO 3-CHOME |
| OHTA-KU, TOKYO, JAPAN |
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| MORGAN & FINNEGAN, L.L.P. |
| MICHAEL M. MURRAY |
| 345 PARK AVENUE |
| NEW YORK, NEW YORK 10154 |
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