Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
09/24/2002
|
Application #:
|
09838236
|
Filing Dt:
|
04/20/2001
|
|
Publication #:
|
|
Pub Dt:
|
12/27/2001
| | | | |
|
Inventors:
|
Hiroyuki Katagiri, Yoshio Seqi, Hideaki Matsuoka, Tetsuya Karaki, Koji Hitsuishi
|
|
Title:
|
METHOD OF CLEANING A FILM DEPOSITION APPARATUS, METHOD OF DRY ETCHING A FILM DEPOSITION APPARATUS, AND AN ARTICLE PRODUCTION METHOD INCLUDING A PROCESS BASED ON THE CLEANING OR DRY ETCHING METHOD
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN |
|
|
|
|
| FITZPATRICK, CELLA, HARPER & SCINTO |
| LAURA A. BAUER |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NY 10112-3801 |
|
|
Search Results as of:
04/19/2024 07:53 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
