Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09947966
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Filing Dt:
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09/06/2001
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Publication #:
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Pub Dt:
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03/14/2002
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Inventors:
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Ping Jiang, Francis G. Celii, Kenneth J. Newton, Hiromi Sakima
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Title:
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DEFECT AND ETCH RATE CONTROL IN TRENCH ETCH FOR DUAL DAMASCENE PATTERNING OF LOW-K DIELECTRICS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| M.S. 3999 |
| P.O. BOX 655474 |
| DALLAS, TEXAS 75265 |
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| TEXAS INSTRUMENTS INCORPORATED |
| JACQUELINE J. GARNER |
| P.O. BOX 655474, M.S. 3999 |
| DALLAS, TEXAS 75265 |
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