Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09629329
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Filing Dt:
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08/01/2000
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Inventors:
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Chang Lin Hsieh, Hui Chen, Jie Yuan, Yan Ye
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Title:
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NH3 PLASMA DESCUMMING AND RESIST STRIPPING IN SEMICONDUCTOR APPLICATIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT COUNSEL, M/S 2061 |
| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC |
| PETER J. SGARBOSSA |
| PATENT COUNSEL, M/S 2061 |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
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