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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/24/2002
Application #:
09756515
Filing Dt:
01/09/2001
Publication #:
Pub Dt:
11/22/2001
Inventors:
Craig M. Herzinger, Thomas E. Tiwald
Title:
DETERMINATION OF THICKNESS AND IMPURITY PROFILES IN THIN MEMBRANES UTILIZING SPECTORSCOPIC DATA OBTAINED FROM ELLIPSOMETRIC INVESTIGATION OF BOTH FRONT AND BACK SURFACES
Assignment: 1
Reel/Frame:
011804/0696Recorded: 05/16/2001Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/29/2000
Exec Dt:
12/29/2000
Assignee:
645 M STREET
LINCOLN, NEBRASKA 68508
Correspondent:
JAMES D. WELCH
10328 PINEHURST AVENUE
OMAHA, NE 68124

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