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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/24/2002
Application #:
09808049
Filing Dt:
03/15/2001
Publication #:
Pub Dt:
02/21/2002
Inventors:
Toru Suzuki, Osamu Wakabayashi
Title:
METHOD AND INSTRUMENT FOR MEASURING VACUUM ULTRAVIOLET LIGHT BEAM, METHOD OF PRODUCING DEVICE AND OPTICAL EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
011612/0539Recorded: 03/15/2001Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/19/2001
Exec Dt:
02/15/2001
Assignee:
2-3-6, AKASAKA, MINATO-KU
TOKYO 107-8414, JAPAN
Correspondent:
STEVENS, DAVIS, MILLER & MOSHER, LLP
JAMES E. LEDBETTER
SUITE 850
1615 L STREET, NW
WASHINGTON, DC 20036

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