Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/01/2002
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Application #:
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09803966
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Filing Dt:
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03/13/2001
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Publication #:
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Pub Dt:
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09/20/2001
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Inventors:
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Kunie Ogata, Ryouichi Uemura, Masanori Tateyama, Yoshiyuki Nakajima
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TBS BROADCAST CENTER |
| TOKYO-TO 107-8481, JAPAN |
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| SPIVAK OBLON MCCLELLAND ET AL. |
| MARVIN J. SPIVAK |
| 1755 JEFFERSON DAVIS HWY., 4TH FL. |
| ARLINGTON, VA 22202 |
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