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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6458516
Issue Dt:
10/01/2002
Application #:
09551255
Filing Dt:
04/18/2000
Inventors:
Yan Ye, Pavel Ionov, Allen Zhao, Peter Hsieh, Jie Yuan, Diana Ma, Chun Yan
Title:
METHOD OF ETCHING DIELECTRIC LAYERS USING A REMOVABLE HARDMASK
Assignment: 1
Reel/Frame:
010983/0346Recorded: 07/17/2000Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
YE, YAN
Exec Dt:
05/13/2000
HSIEH, PETER
Exec Dt:
05/31/2000
MA, DIANA XIAOBING
Exec Dt:
05/03/2000
YAN, CHUN
Exec Dt:
05/01/2000
YUAN, JIE
Exec Dt:
05/02/2000
ZHAO, ALLEN
Exec Dt:
05/02/2000
IONOV, PAVEL
Exec Dt:
05/06/2000
Assignee:
APPLIED MATERIALS, INC.
PO BOX 450-A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
P.O. BOX 450-A
SANTA CLARA, CA 95052

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