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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/08/2002
Application #:
09442314
Filing Dt:
11/22/1999
Inventors:
PEI CHING LEE, WEN JUN LIU, MEI SHENG ZHOU
Title:
MULTIPLE-STEP PLASMA ETCHING PROCESS FOR SILICON NITRIDE
Assignment: 1
Reel/Frame:
010402/0046Recorded: 11/22/1999Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/28/1999
Exec Dt:
09/28/1999
Exec Dt:
09/28/1999
Assignee:
STREET 2
60 WOODLANDS INDUSTRIAL PARK D
SINGAPORE, SINGAPORE 73840
Correspondent:
GEORGE O. SAILE
20 MCINTOSH DRIVE
POUGHKEEPSIE, NY 12603

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