Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/08/2002
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Application #:
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09493742
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Filing Dt:
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01/28/2000
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Inventors:
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Jeff C. Cheung, Alexandros T. Demos
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Title:
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APPARATUS AND PROCESS FOR CONTROLLING THE TEMPERATURE OF A SUBSTRATE IN A PLASMA REACTOR CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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LEGAL AFFAIRS DEPARTMENT |
PO BOX 450A, M/S 2061 |
SANTA CLARA, CALIFORNIA 95054 |
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APPLIED MATERIALS, INC. |
ROBERT W. MILCAHY |
PO BOX 450A |
SANTA CLARA, CA 95052 |
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