Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/22/2002
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Application #:
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09606666
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Filing Dt:
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06/30/2000
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Inventors:
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Robert T. Lum, David W. Groechel, Li Wu, Chiu Chan
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Title:
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TUNGSTEN CMP WITH IMPROVED ALIGNMENT MARK INTEGRITY, REDUCED EDGE RESIDUE, AND REDUCED RETAINER RING NOTCHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT DEPARTMENT |
| P.O. BOX 450A, M/S #2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBET W. MULCAHY |
| PATENT COUNSEL, PATENT DEPT. |
| P.O. BOX 450A, M/S 2061 |
| SANTA CLARA, CA 95052 |
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