Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/29/2002
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Application #:
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09664448
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Filing Dt:
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09/18/2000
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Inventors:
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Yoshizawa Masaki, Shigeru Moriya
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Title:
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METHOD OF COMPUTING DEFOCUS AMOUNT IN LITHOGRAPHY AND LITHOGRAPHIC PROCESS USING THE METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7-35 KITASHINAGAWA 6-CHOME SHINAGAWA-KU |
| TOKYO, JAPAN |
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| RADER, FISHMAN & GRAUER |
| RONALD P. KANANEN, ESQ. |
| SUITE 501 |
| 1233 20TH STREET, NW |
| WASHINGTON, D.C. 20036 |
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