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Patent Assignment Abstract of Title
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Total Assignments: 5
Patent #:
6476921
Issue Dt:
11/05/2002
Application #:
09628471
Filing Dt:
07/31/2000
Inventors:
Jamie Nam, Nannaji Saka, Hilario L. Oh
Title:
IN-SITU METHOD AND APPARATUS FOR END POINT DETECTION IN CHEMICAL MECHANICAL POLISHING
Assignment: 1
Reel/Frame:
011420/0828Recorded: 12/27/2000Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
OH, HILARIO L.
Exec Dt:
10/20/2000
Assignee:
SILICON VALLEY GROUP, INC.
440 KINGS VILLAGE ROAD
SCOTTS VALLEY, CALIFORNIA 95066
Correspondent:
FLEHR HOHBACH TEST ALBRITTON ET AL
MARIA S. SWIATEK
SUITE 3400
FOUR EMBARCADERO CENTER
SAN FRANCISCO, CALIFORNIA 94111-4187
Assignment: 2
Reel/Frame:
013246/0657Recorded: 09/03/2002Pages: 4
Conveyance:
CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
Assignor:
SILICON VALLEY GROUP, INC.
Exec Dt:
11/01/2001
Assignee:
ASML US, INC.
440 KINGS VILLAGE ROAD
SCOTTS VALLEY, CALIFORNIA 95066
Correspondent:
DORSEY & WHITNEY LLP
MARIA S. SWIATEK
FOUR EMBARCADERO CENTER
STE. 3400
SAN FRANCISCO, CA 94111-4187
Assignment: 3
Reel/Frame:
013246/0652Recorded: 09/03/2002Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
NAM, JAMIE
Exec Dt:
06/19/2002
SAKA, NANNAJI
Exec Dt:
08/28/2002
Assignee:
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
77 MASSACHUSETTS AVENUE
CAMBRIDGE, MASSACHUSETTS 02139
Correspondent:
DORSEY & WHITNEY LLP
MARIA S. SWIATEK
SUITE 3400
FOUR EMBARCADERO CENTER
SAN FRANCISCO, CA 94111-4187
Assignment: 4
Reel/Frame:
019910/0568Recorded: 10/03/2007Pages: 65
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
ASML US, INC.
Exec Dt:
10/10/2003
Assignee:
THERMAL ACQUISITION CORP.
440 KINGS VILLAGE ROAD
SCOTTS VALLEY, CALIFORNIA 95066-4081
Correspondent:
MORGAN, LEWIS & BOCKIUS LLP
2 PALO ALTO SQUARE
3000 EL CAMINO REAL, SUITE 700
PALO ALTO, CA 94306
Assignment: 5
Reel/Frame:
019910/0668Recorded: 10/03/2007Pages: 4
Conveyance:
MERGER/CHANGE OF NAME
Assignor:
THERMAL ACQUISITION CORP.
Exec Dt:
10/15/2003
Assignee:
AVIZA TECHNOLOGY, INC.
440 KINGS VILLAGE ROAD
SCOTTS VALLEY, CALIFORNIA 95066-4081
Correspondent:
MORGAN, LEWIS & BOCKIUS LLP
2 PALO ALTO SQUARE
3000 EL CAMINO REAL, SUITE 700
PALO ALTO, CA 94306

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