Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/12/2002
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Application #:
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09283191
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Filing Dt:
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04/01/1999
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Inventor:
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NOBUSHIGE KORENAGA
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Title:
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STAGE MECHANISM, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
IN WHICH A COIL UNIT OF A DRIVING MECHANISM IS MOVED SUBSTANTIALLY IN SYNCHRONISM WITH A STAGE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OHTA-KU |
| 3-30-2, SHIMOMARUKO |
| TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| STEVEN E. WARNER |
| 30 ROCKEFELLER PLAZA |
| NY, NY 10112-3801 |
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