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Patent Assignment Abstract of Title
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Total Assignments: 4
Patent #:
Issue Dt:
11/26/2002
Application #:
09676871
Filing Dt:
09/29/2000
Inventors:
Venkatachalam C. Prakash, Ulrich Mantz
Title:
AN IN-SITU METHOD FOR MEASURING THE ENDPOINT OF A RESIST RECESS ETCH PROCESS
Assignment: 1
Reel/Frame:
011789/0384Recorded: 05/10/2001Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
04/03/2001
Assignee:
1730 NORTH FIRST STREET
SAN JOSE, CALIFORNIA 95112
Correspondent:
SIEMENS CORPORATION
ELSA KELLER
INTELLECTUAL PROPERTY DEPARTMENT
186 WOOD AVENUE SOUTH
ISELIN, NJ 08830
Assignment: 2
Reel/Frame:
011793/0085Recorded: 05/10/2001Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
04/06/2001
Assignee:
1730 NORTH FIRST STREET
SAN JOSE, CALIFORNIA 95112
Correspondent:
SIEMENS CORPORATION
ELSA KELLER
INTELLECTUAL PROPERTY DEPARTMENT
186 WOOD AVENUE SOUTH
ISELIN, NEW JERSEY 08830
Assignment: 3
Reel/Frame:
013445/0340Recorded: 10/29/2002Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
10/14/2002
Assignee:
ST. MARTIN-STR. 53
81541 MUNICH, GERMANY
Correspondent:
SIEMENS CORP.
ELSA KELLER
186 WOOD AVENUE S.
IP DEPT.
ISELIN, NJ 08830
Assignment: 4
Reel/Frame:
023828/0001Recorded: 01/13/2010Pages: 398
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
04/25/2006
Assignee:
GUSTAV-HEINEMANN-RING 212
MUNICH, GERMANY 81739
Correspondent:
BARRY E. BRETSCHNEIDER
C/O MORRISON & FOERSTER LLP
1650 TYSONS BLVD. SUITE 400
MCLEAN, VA 22102

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