Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/03/2002
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Application #:
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09619143
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Filing Dt:
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07/19/2000
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Inventors:
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Hsu-Pin Wang, Qing Liu
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Title:
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METHOD AND APPARATUS FOR DETECTING MICRO-SCRATCHES IN SEMICONDUCTOR WAFERS DURING POLISHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FLORIDA STATE UNIVERSITY |
| 109 WESCOTT BUILDING |
| TALLAHASSEE, FLORIDA 32308 |
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| THOMPSON COBURN LLP |
| ALAN H. NORMAN |
| ONE US BANK PLAZA, SUITE 3500 |
| ST. LOUIS, MO 63101-9928 |
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