Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/03/2002
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Application #:
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09119162
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Filing Dt:
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07/20/1998
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Inventors:
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YOSHIJIRO USHIO, TAKEHIKO UEDA, EIJI MATSUKAWA, MOTOO KOYAMA
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Title:
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APPARATUS AND METHODS FOR DETECTING THICKNESS OF A PATTERNED LAYER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| FUJI BUILDING |
| TOKYO 100, JAPAN |
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| KLARQUIST SPARKMAN CAMPBELL ET AL. |
| DONALD L. STEPHENS JR. |
| ONE WORLD TRADE CENTER, SUITE 1600 |
| 121 S.W. SALMON STREET |
| PORTLAND, OR 97204-2988 |
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