Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/10/2002
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Application #:
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09534171
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Filing Dt:
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03/24/2000
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Inventors:
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Ching-Liang Wu, Yueh-Lin Chou, Jen-Hui Tseng
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Title:
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METHOD FOR FORMING AN ATTENUATED PHASE-SHIFTING MASK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 25, LI-HSIN RD |
| HSINCHU, TAIWAN R.O.C |
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| LOWE HAUPTMAN GOPSTEIN GILMAN & BERNER |
| BENJAMIN J. HAUPTMAN |
| 1700 DIAGONAL ROAD |
| SUITE 310 |
| ALEXANDRIA, VA 22314 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| 121, PARK AVE., II |
| HSIN-CHU 300, TAIWAN R.O.C |
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| THOMAS, KAYDEN, HORSTEMEYER, ET AL. |
| DANIEL R. MCCLURE |
| 100 GALLERIA PARKWAY, SUITE 1750 |
| ATLANTA, GA 30339 |
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