Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/10/2002
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Application #:
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09868645
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Filing Dt:
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06/28/2001
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Inventors:
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Chihiro Taguchi, Ryo Nonaka
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Title:
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PLASMA APPARATUS AND LOWER ELECTRODE THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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| OBLON SPIVAK MCCLELLAND ET AL. |
| SURINDER SACHAR |
| 4TH FLR |
| 1755 JEFFERSON DAVIS HWY |
| ARLINGTON, VA 22202 |
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