Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/24/2002
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Application #:
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09082006
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Filing Dt:
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05/20/1998
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Inventors:
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NOBUMASA SUZUKI, MANABU MATSUO, HIROHISA ODA
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Title:
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PLASMA PROCESSING APPARATUS PROVIDED WITH MICROWAVE APPLICATOR HAVING ANNULAR WAVEGUIDE AND PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, 3-CHOME, SHIMOMARUKO, OHTA-KU |
| TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| ABIGAIL F. COUSINS |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NEW YORK 10112-3801 |
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