Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/24/2002
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Application #:
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09598828
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Filing Dt:
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06/21/2000
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Inventor:
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Li-Ming Wang
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Title:
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METHOD FOR SUPPRESSING OPTICAL PROXIMITY EFFECT BIAS WITHIN A WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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SCIENCE-BASED INDUSTRIAL PARK |
NO. 4 CREATION RD. III |
HSINCHU, R.O.C., TAIWAN |
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NIRO, SCAVONE, HALLER & NIRO |
KEITH A. VOGT |
181 W. MADISON - SUITE 4600 |
CHICAGO, IL 60602 |
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