Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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09845375
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Filing Dt:
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04/30/2001
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Inventors:
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Bhanwar Singh, Ramkumar Subramanian, Bharath Rangarajan, Carmen Lapid Morales
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Title:
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AUTOMATED PERIODIC FOCUS AND EXPOSURE CALIBRATION OF A LITHOGRAPHY STEPPER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE AMD PLACE, P.O. BOX 3453 |
| SUNNYVALE, CALIFORNIA 94088 |
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| ESCHWEILER & ASSOCIATES, LLC |
| THOMAS G. ESCHWEILER |
| NATIONAL CITY BANK BUILDING |
| 629 EUCLID AVENUE, SUITE 1210 |
| CLEVELAND, OH 44114 |
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