Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/07/2003
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Application #:
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09722817
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Filing Dt:
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11/28/2000
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Inventors:
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Kazuya Ota, Akikazu Tanimoto, Hiroyuki Kondo, Noriaki Kandaka
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Title:
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LASER-EXCITED PLASMA LIGHT SOURCE, EXPOSURE APPARATUS AND ITS MAKING METHOD, AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO, 100-8331, JAPAN |
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| OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT |
| RAYMOND F. CARDILLO, JR. |
| 1755 JEFFERSON DAVIS HIGHWAY, 4TH FLOOR |
| ARLINGTON, VA 22202 |
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