Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
01/14/2003
|
Application #:
|
09471590
|
Filing Dt:
|
12/23/1999
|
|
Publication #:
|
|
Pub Dt:
|
08/22/2002
| | | | |
|
Inventors:
|
BRIAN M. BLIVEN, ROY WINSTON PASCAL
|
|
Title:
|
METHOD FOR CONTROLLING AIRFLOW ON A BACKSIDE OF A SEMICONDUCTOR WAFER DURING SPIN PROCESSING
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
|
|
|
|
| MARTINE PENNILLA & KIM, LLP |
| PETER B. MARTINE |
| 710 LAKEWAY DRIVE |
| SUITE 170 |
| SUNNYVALE, CA 94086 |
|
|
Search Results as of:
05/21/2024 03:26 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
