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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6506097
Issue Dt:
01/14/2003
Application #:
09764733
Filing Dt:
01/16/2001
Publication #:
20030003845
Pub Dt:
01/02/2003
Inventors:
Bret W. Adams, Boguslaw A. Swedek, Rajeev Bajaj, Savitha Nanjangud et al
Title:
OPTICAL MONITORING IN A TWO-STEP CHEMICAL MECHANICAL POLISHING PROCESS
Assignment: 1
Reel/Frame:
011907/0353Recorded: 08/27/2001Pages: 25
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
ADAMS, BRET W.
Exec Dt:
03/26/2001
SWEDEK, BOGUSLAW A.
Exec Dt:
02/26/2001
BAJAJ, RAJEEV
Exec Dt:
02/28/2001
NANJANGUD, SAVITHA
Exec Dt:
02/28/2001
WISWESSER, ANDREAS NORBERT
Exec Dt:
02/23/2001
TSAI, SHAN D.
Exec Dt:
02/23/2001
CHAN, DAVID A.
Exec Dt:
03/01/2001
REDEKER, FRED C.
Exec Dt:
02/28/2001
BIRANG, MANOOCHER
Exec Dt:
02/27/2001
Assignee:
APPLIED MATERIALS, INC.
P.O. BOX 450A
LEGAL AFFAIRS DEPARTMENT - M/S 2061
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS, INC.
PATENT COUNSEL
LEGAL AFFAIRS DEPARTMENT - M/S 2061
P.O. BOX 450A
SANTA CLARA, CA 95052

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