Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/21/2003
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Application #:
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09557684
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Filing Dt:
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04/25/2000
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Inventors:
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Neil Benjamin, Scott Baldwin, Seyed Jafar Jafarian-Tehrani
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Title:
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VOLTAGE CONTROL SENSOR AND CONTROL INTERFACE FOR RADIO FREQUENCY POWER REGULATION IN A PLASMA REACTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| HICKMAN STEPHENS COLEMAN & HUGHES, LLP |
| RONALD B. FEECE |
| P.O. BOX 52037 |
| PALO ALTO, CALIFORNIA 94303-0746 |
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