Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/28/2003
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Application #:
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09818359
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Filing Dt:
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03/26/2001
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Publication #:
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Pub Dt:
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11/21/2002
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Inventors:
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Padmanabhan Krishnaraj, Robert Duncan, Joseph D'Souza, Alan W. Collins, Nasreen Chopra et al
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Title:
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METHODS AND APPARATUS FOR PRODUCING STABLE LOW K FSG FILM FOR HDP-CVD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT DEPARTMENT |
| P. O. BOX 450A M/S #2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| PATENT COUNSEL PATENT DEPT. |
| P. O. BOX 450A M/S 2061 |
| SANTA CLARA, CA 95052 |
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