Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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01/28/2003
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Application #:
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09614312
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Filing Dt:
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07/12/2000
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Inventors:
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Bradley M. Davis, Allen L. Evans, Graig W. Christian
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Title:
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METHOD AND APPARATUS FOR REDUCING DEPOSITION VARIATION BY MODELING POST-CLEAN CHAMBER PERFORMANCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5204 E. BEN WHITE BLVD. |
| AUSTIN, TEXAS 78741 |
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| WILLIAMS, MORGAN & AMERSON, P.C. |
| J. MIKE AMERSON |
| 7676 HILLMONT, SUITE 250 |
| HOUSTON, TEXAS 77040 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| 8110 GATEHOUSE RD. |
| SUITE 100 EAST |
| FALLS CHURCH, VA 22042 |
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