Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/04/2003
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Application #:
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09702679
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Filing Dt:
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11/01/2000
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Inventors:
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Takehiko Orii, Hiroki Ohno, Takashi Yabuta
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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| SMITH, GAMBRELL & RUSSELL, LLP |
| BEVERIDGE, DEGRANDI ET AL |
| INTELLECTUAL PROPERTY GROUP |
| 1850 M STREET N.W. (SUITE 800) |
| WASHINGTON, DC 20036 |
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