Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/04/2003
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Application #:
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09520623
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Filing Dt:
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03/07/2000
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Inventors:
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KENNETH COLLINS, MICHAEL RICE, ERIC ASKARINAM, DOUGLAS BUCHBERGER, CRAIG RODERICK
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Title:
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THERMAL CONTROL APPARATUS FOR INDUCTIVELY COUPLED RF PLASMA REACTOR HAVING AN OVERHEAD SOLENOIDAL ANTENNA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| LEGAL AFFAIRS DEPARTMENT - M/S 2061 |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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