Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/11/2003
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Application #:
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09504312
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Filing Dt:
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02/15/2000
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Inventors:
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Kenneth S. Collins, Chan-Lon Yang, Jerry Yuen-Kui Wong, Jeffrey Marks, Peter R. Keswick et al
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Title:
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PLASAMA REACTOR USING INDUCTIVE RF COUPLING AND PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| PATENT COUNSEL |
| BIRGIT E. MORRIS |
| PO BOX 450A |
| SANTA CLARA CA 95052 |
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