Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/25/2003
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Application #:
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09624355
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Filing Dt:
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07/24/2000
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Inventors:
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Motosuke Miyoshi, Yuichiro Yamazaki, Katsuya Okumura
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Title:
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ELECTRON BEAM LITHOGRAPHY SYSTEM AND PATTERN WRITING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 72, HORIKAWA-CHO, SAIWAI-KU |
| KAWASAKI-SHI, KANAGAWA-KEN, JAPAN |
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| FINNEGAN, HENDERSON ET AL |
| MR. ERNEST F. CHAPMAN |
| 1300 I STREET, NW |
| WASHINGTON, DC 20005-3315 |
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