Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/04/2003
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Application #:
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09895537
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Filing Dt:
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06/29/2001
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Inventors:
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Bi-Ming Yen, Tuqiang Ni, Lumin Li, David Hemker
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Title:
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CONFIGURABLE PLASMA VOLUME ETCH CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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MARTINE & PENILLA, LLP |
RICK VON WOHLD, ESQ. |
710 LAKEWAY DRIVE, SUITE 170 |
SUNNYVALE, CA 94085 |
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05/13/2024 08:59 PM
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