Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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03/18/2003
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Application #:
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09799408
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Filing Dt:
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03/05/2001
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Inventors:
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Michael Lee Miller, Scott G. Bushman
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Title:
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METHOD AND APPARATUS FOR THE INTEGRATION OF SENSOR DATA FROM A PROCESS TOOL IN AN ADVANCED PROCESS CONTROL (APC) FRAMEWORK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5204 E. BEN WHITE BLVD. |
| AUSTIN, TEXAS 78741 |
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| WILLIAMS, MORGAN & AMERSON, P.C. |
| TERRY D. MORGAN |
| 7676 HILLMONT, SUITE 250 |
| HOUSTON, TEXAS 77040 |
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Assignment:
2
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SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2485 AUGUSTINE DRIVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| CHRISTOPHER J. RECKAMP |
| 311 S. WACKER DRIVE |
| FAEGRE BAKER DANIELS LLP |
| CHICAGO, IL 60606 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 121 W. LONG LAKE ROAD |
| SUITE 300 |
| BLOOMFIELD HILLS, MICHIGAN 48304 |
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| FENG XU |
| 1526 GILPIN AVENUE |
| WILMINGTON, DE 19806 |
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