Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/01/2003
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Application #:
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09981629
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Filing Dt:
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10/16/2001
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Publication #:
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Pub Dt:
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06/13/2002
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Inventors:
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Katsuhisa Kasanami, Eisuke Nishitani, Michiko Nishiwaki, Satoshi Okada
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-20, 3-CHOME, HIGASHI-NAKANO, NAKANO-KU |
| TOKYO 164-8511, JAPAN |
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| MICHAEL CRAPENHOFT, ESQ. |
| HOGAN & HARTSON L.L.P. |
| 500 SOUTH GRAND AVENUE, SUITE 1900 |
| LOS ANGELES, CA 90071 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| VOLPE & KOENIG, P.C. |
| 30 SOUTH 17TH STREET |
| SUITE 1800 |
| PHILADELPHIA, PA 19103 |
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