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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	6541371	Issue Dt:	04/01/2003	Application #:	09491853	Filing Dt:	01/26/2000
Inventors:	Kaihan A. Ashitiani, Maximilian A. Biberger, Erich R. Klawuhn, Kwok Fai Lai et al
Title:	APPARATUS AND METHOD FOR DEPOSITING SUPERIOR TA(N)/COPPER THIN FILMS FOR BARRIER AND SEED APPLICATIONS IN SEMICONDUCTOR PROCESSING

Assignment: 1

Reel/Frame:

Recorded: 01/26/2000

Pages: 5

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

ASHTIANI, KAIHAN A.

Exec Dt:

01/12/2000

BIBERGER, MAXIMILIAN A.

Exec Dt:

01/21/2000

KLAWHUN, ERICH R.

Exec Dt:

01/12/2000

Exec Dt:

01/17/2000

Exec Dt:

01/12/2000

RYMER, J. PATRICK

Exec Dt:

01/12/2000

Assignee:

NOVELLUS SYSTEMS, INC.

3970 NORTH FIRST STREET

SAN JOSE, CALIFORNIA 95134

Correspondent:

DELIO & PETERSON, LLC

SHIRLEY S. MA

121 WHITNEY AVENUE

NEW HAVEN, CT 06510-1241

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