Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/01/2003
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Application #:
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09912579
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Filing Dt:
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07/24/2001
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Publication #:
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Pub Dt:
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01/30/2003
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Inventors:
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Chentsau Ying, Jeng H. Hwang
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Title:
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Plasma etching process for metals and metal oxides, including metals and metal oxides inert to oxidation
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVE. |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| PATENT COUNSEL, LEGAL AFFAIRS DEPARTMENT |
| M/S 2061, P.O. BOX 450 |
| SANTA CLARA, CA 95052 |
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