Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/08/2003
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Application #:
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09615035
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Filing Dt:
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07/12/2000
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Inventors:
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Bruce E. Mayer, Robert H. Chatham III, Nitin K. Ingle, Zheng Yuan
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Title:
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METHOD AND SYSTEM FOR IN-SITU CLEANING OF SEMICONDUCTOR MANUFACTURING EQUIPMENT USING COMBINATION CHEMISTRIES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 440 KINGS VILLAGE ROAD |
| SCOTTS VALLEY, CALIFORNIA 95066 |
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| ALBRITTON & HERBERT LLP |
| MARIA S. SWIATEK |
| FOUR EMBARCADERO CENTER |
| SUITE 3400 |
| SAN FRANCISCO, CA 94111-4187 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 440 KINGS VILLAGE ROAD |
| SCOTTS VALLEY, CALIFORNIA 95066 |
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| DORSEY & WHITNEY LLP |
| MARIA S. SWIATEK |
| SUITE 3400 |
| FOUR EMBARCADERO CENTER |
| SAN FRANCISCO, CA 94111-4187 |
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