Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/08/2003
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Application #:
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09653824
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Filing Dt:
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09/01/2000
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Inventor:
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Kenji Morita
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Title:
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METHODS AND DEVICES FOR DETERMINING TIMES FOR MAINTENANCE ACTIVITY PERFORMED ON A CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY APPARATUS, AND MICROELECTRONIC-DEVICE-MANUFACTURING METHODS COMPRISING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MARUNOUCHI 3-CHOME, CHIYODA-KU |
| FUJI BUILDING, 2-3 |
| TOKYO, 100, JAPAN |
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| KLARQUIST SPARKMAN CAMPBELL ET AL. |
| DONALD L. STEPHENS JR. |
| 121 S.W. SALMON STREET |
| PORTLAND, OR 97204-2988 |
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