Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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04/22/2003
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Application #:
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09852221
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Filing Dt:
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05/09/2001
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Publication #:
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Pub Dt:
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11/14/2002
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Inventors:
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James C. Carroll, Dennis M. Klesel, Bryan C. Lagos, Klaus Petry
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Title:
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METHOD AND APPARATUS FOR THE GROUNDING OF PROCESS WAFERS BY THE USE OF CONDUCTIVE REGIONS CREATED BY ION IMPLANTATION INTO THE SURFACE OF AN ELECTROSTATIC CLAMP
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 55 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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| ESCHWEILER & ASSOCIATES, LLC |
| THOMAS G. ESCHWEILER |
| NATIONAL CITY BANK BUILDING |
| 629 EUCLID AVENUE, SUITE 1210 |
| CLEVELAND, OHIO 44114 |
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Assignment:
2
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| 3003 TASMAN DRIVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| CHRISTOPHER E. KONDRACKI |
| 2001 JEFFERSON DAVIS, HWY., SUITE 1007 |
| ARLINGTON, VA 22202 |
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Assignment:
3
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CONSENT AND LICENSE AGREEMENT
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| 4-10-1 YOGA, SETAGAYA-KU |
| TOKYO, JAPAN 158-0097 |
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| PETER J. YIM |
| MORRISON & FOERSTER LLP |
| 425 MARKET STREET |
| SAN FRANCISCO, CA 94105-2482 |
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