Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/29/2003
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Application #:
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10175873
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Filing Dt:
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06/21/2002
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Publication #:
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Pub Dt:
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03/20/2003
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Inventors:
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Masayuki Saito, Junichi Taniuchi, Koji Okamoto, Hiroaki Suzuki
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Title:
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CVD MATERIAL COMPOUND AND METHOD FOR MANUFACTURING THE SAME AND CVD METHOD OF RUTHENIUM OR RUTHENIUM COMPOUND THIN FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-6, NIHONBASHIKAYABA-CHO 2-CHOME, CHUO-KU |
| TOKYO 103-8206,, JAPAN |
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| ARENT FOX |
| KINTNER PLOTKIN & KAHN PLLC |
| 1050 CONNECTICUT AVENUE, N.W., SUITE 400 |
| WASHINGTON, D.C. 20036-5339 |
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