Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/13/2003
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Application #:
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09685051
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Filing Dt:
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10/06/2000
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Inventors:
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Andras Kuthi, Andreas Fischer
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Title:
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SYSTEM, APPARATUS, AND METHOD FOR PROCESSING WAFER USING SINGLE FREQUENCY RF POWER IN PLASMA PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE PENILLA & KIM, LLP |
| RAYMIS H. KIM, ESQ. |
| 710 LAKEWAY DRIVE, SUITE 170 |
| SUNNYVALE, CA 94085 |
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