Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/13/2003
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Application #:
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08743628
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Filing Dt:
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11/04/1996
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Inventors:
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DAVID CHEUNG, JOE FENG, JUDY H. HUANG, WAI-FAN YAU
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Title:
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METHOD AND APPARATUS FOR IMPROVING ACCURACY IN PHOTOLITHOGRAPHIC PROCESSING OF SUBSTRATES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P. O. BOX 450A, M/S #2061 |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| MICHAEL B. EINSCHLAG |
| PATENT COUNSEL, LEGAL AFFAIRS DEPT. |
| P. O. BOX 450A, M/S 2061 |
| SANTA CLARA, CA 95052 |
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