Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/13/2003
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Application #:
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09997870
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Filing Dt:
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11/28/2001
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Inventors:
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Krishnan Shrinivasan, Arkadiy Shimanovich, Prasad N. Gadgil
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Title:
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MEASUREMENT OF SUBSTRATE TEMPERATURE IN A PROCESS CHAMBER USING NON-CONTACT FILTERED INFRARED PYROMETRY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| MARTINE & PENILLA,LLP |
| MICHAEL L. GENCARELLA ESQ |
| 710 LAKEWAY DRIVE |
| SUITE 170 |
| SUNNYVALE, CA 94085 |
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