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Patent Assignment Abstract of Title
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Total Assignments: 6
Patent #:
6563586
Issue Dt:
05/13/2003
Application #:
09613176
Filing Dt:
07/10/2000
Inventors:
Fred Stanke, Clinton B. Carlisle, Hung Pham, Edric Tong, Douglas E. Ruth, James Cahill et al
Title:
WAFER METROLOGY APPARATUS AND METHOD
Assignment: 1
Reel/Frame:
011208/0351Recorded: 10/26/2000Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
STANKE, FRED E.
Exec Dt:
09/26/2000
CARLISLE, CLINTON B.
Exec Dt:
10/07/2000
PHAM, HUNG
Exec Dt:
10/06/2000
TONG, EDRIC
Exec Dt:
10/03/2000
RUTH, DOUGLAS E.
Exec Dt:
10/03/2000
CAHILL, JAMES M.
Exec Dt:
10/03/2000
WEBER, MICHAEL
Exec Dt:
10/03/2000
BURKE, ELLIOT
Exec Dt:
10/05/2000
Assignee:
SENSYS INSTRUMENTS CORPORATION
2090 DUANE AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
WILSON SONSINI GOODRICH & ROSATI
JOHN GILMORE
FH 1-2
650 PAGE MILL ROAD
PALO ALTO, CA 94304-1050
Assignment: 2
Reel/Frame:
011366/0742Recorded: 10/26/2000Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
STANKE, FRED E.
Exec Dt:
09/26/2000
CARLISLE, CLINTON B.
Exec Dt:
10/07/2000
PHAM, HUNG
Exec Dt:
10/06/2000
TONG, EDRIC
Exec Dt:
10/03/2000
RUTH, DOUGLAS E.
Exec Dt:
10/03/2000
CAHILL, JAMES M.
Exec Dt:
10/03/2000
WEBER, MICHAEL
Exec Dt:
10/06/2000
BURKE, ELLIOT
Exec Dt:
10/05/2000
Assignee:
SENSYS INSTRUMENTS CORPORATION
2090 DUANE AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
WILSON SONSINI GOODRICH & ROSATI
JOHN GILMORE
FH 1-2
650 PAGE MILL ROAD
PALO ALTO, CA 94304-1050
Assignment: 3
Reel/Frame:
014446/0150Recorded: 07/30/2003Pages: 12
Conveyance:
SECURITY AGREEMENT
Assignor:
THERMA-WAVE, INC.
Exec Dt:
06/13/2003
Assignee:
SILICON VALLEY BANK
3003 TASMAN DR.
SANTA CLARA, CALIFORNIA 95054
Correspondent:
BUCHALTER, NEMER & FIELD & YOUNGER
MRS. KIM WALKER
601 SOUTH FIGUEROA ST., STE. 2400
LOS ANGELES, CA 90017
Assignment: 4
Reel/Frame:
014718/0417Recorded: 11/24/2003Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
SENSYS INSTRUMENTS CORPORATION
Exec Dt:
11/17/2003
Assignee:
THERMA-WAVE, INC.
1250 RELIANCE WAY
FREMONT, CALIFORNIA 94539
Correspondent:
STALLMAN & POLLOCK LLP
MICHAEL A. STALLMAN
121 SPEAR STREET, SUITE 290
SAN FRANCISCO, CA 94105
Assignment: 5
Reel/Frame:
016851/0953Recorded: 10/07/2005Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
THERMA-WAVE, INC.
Exec Dt:
09/27/2005
Assignee:
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER
3-6 AKASAKA 5-CHOME MINATO-KU
TOKYO, JAPAN 107-8481
Correspondent:
STALLMAN & POLLOCK LLP
ATTN: MICHAEL A. STALLMAN
353 SACRAMENTO STREET
SUITE 2200
SAN FRANCISCO, CA 94111
Assignment: 6
Reel/Frame:
017136/0621Recorded: 10/24/2005Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
THERMA-WAVE, INC.
Exec Dt:
09/27/2005
Assignee:
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 306 AKASAKA 5-CHOME
MINATO-KU, TOKYO, JAPAN 107-8481
Correspondent:
STALLMAN & POLLOCK LLP
ATTN: MICHAEL A. STALLMAN
SUITE 2200
353 SACRAMENTO STREET
SAN FRANCISCO, CA 94111

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