Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/03/2003
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Application #:
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09749962
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Filing Dt:
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12/27/2000
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Publication #:
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Pub Dt:
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09/06/2001
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Inventors:
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Takeshi Yamaguchi, Shinichi Kojima
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Title:
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CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY METHODS FOR EXPOSING A SEGMENTED RETICLE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FUJI BUILDING, 2-3 MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100, JAPAN |
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| KLARQUIST SPARKMAN CAMPBELL LEIGH & |
| WHINSTON, LLP, DONALD S. STEPHENS JR. |
| 121 S.W. SALMON STREET, ONE WORLD TRADE |
| CENTER, SUITE 1600 |
| PORTLAND, OREGON 97204-2988 |
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