Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/03/2003
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Application #:
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09864244
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Filing Dt:
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05/25/2001
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Publication #:
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Pub Dt:
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11/28/2002
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Inventors:
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Michael S. Gordon, Jon E. Lieberman, Christopher F. Robinson
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Title:
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METHOD FOR ALIGNING ELECTRON BEAM PROJECTION LITHOGRAPHY TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OHI PLANT |
| 6-3, NISHI-OHI 1-CHOME |
| TOKYO, JAPAN 140-6 |
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| MCGUIRE WOODS, LLP |
| MARSHALL M. CURTIS |
| 1750 TYSONS BLVD. |
| SUITE 1800 |
| MCLEAN, VA 22102-4215 |
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