Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/10/2003
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Application #:
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09875341
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Filing Dt:
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06/06/2001
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Publication #:
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Pub Dt:
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12/12/2002
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Inventors:
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Edward L. Sill, William D. Jones, Craig T. Baldwin
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Title:
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APPARATUS AND METHOD FOR MEASURING SUBSTRATE BIASING DURING PLASMA PROCESSING OF A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-6 AKASAKA 5-CHOME MINATO-KU |
TOKYO 107, JAPAN |
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WOOD, HERRON & EVANS, L.L.P. |
KURT A. SUMME |
2700 CAREW TOWER |
441 VINE STREET |
CINCINNATI, OHIO 45202 |
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