Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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06/10/2003
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Application #:
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09878697
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Filing Dt:
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06/11/2001
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Publication #:
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Pub Dt:
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08/22/2002
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Inventors:
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Udo Dinger, Hans-Jurgen Mann, Wolfgang Singer
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Title:
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REDUCTION OBJECTIVE FOR EXTREME ULTRAVIOLET LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 89518 HEIDENHEIM, GERMANY |
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| MARSHALL, GERSTEIN & BORUN |
| PAUL B. STEPHENS |
| 6300 SEARS TOWER |
| 233 S. WACKER DRIVE |
| CHICAGO, IL 60606-6357 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STRASSE 22 |
| OBERKOCHEN, GERMANY 73447 |
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| MARSHALL, GERSTEIN & BORUN LLP |
| PAUL B. STEPHENS |
| 233 S. WACKER DRIVE, SUITE 6300 |
| SEARS TOWER |
| CHICAGO, ILLINOIS 60606-6357 |
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Assignment:
3
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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