Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09879751
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Filing Dt:
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06/11/2001
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Inventors:
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James Broc Stirton, Kevin R. Lensing
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Title:
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METHOD OF CONTROLLING PHOTOLITHOGRAPHY PROCESSES BASED UPON SCATTEROMETRIC MEASUREMENTS OF SUB-NOMINAL GRATING STRUCTURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5204 E. BEN WHITE BLVD. |
| AUSTIN, TEXAS 78741 |
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| WILLIAMS, MORGAN & AMERSON, P.C. |
| J. MIKE AMERSON |
| 7676 HILLMONT, SUITE 250 |
| HOUSTON, TEXAS 77040 |
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